| Flow Range | 0SCCM to 1000SCCM |
| PCB changed | 3 |
| ECCN (US) | EAR99 |
| Maximum Operating Pressure | 150psi |
| Package Length | 30.48 |
| Minimum Operating Temperature (°C) | -25 |
| Pin Count | 3 |
| Maximum Operating Temperature (°C) | 85 |
| Mounting | Screw |
| Sensor Type | Mass |
| Medium | Hydrogen |
| Package Height | 30.23 |
| Part Status | Active |
| Maximum Operating Supply Voltage (V) | 15 |
| Typical Operating Supply Voltage (V) | 10 |
| EU RoHS | Compliant |
| Minimum Operating Supply Voltage (V) | 8 |
